EISBN
978-1-5106-4052-8
ISBN
978-1-5106-4051-1
ISSN
0277-786X
Conference
Conference on Extreme Ultraviolet (EUV) Lithography XII
Journal
Proceedings of SPIE
Volume
11609
Title
Novel processing technologies for advanced EUV patterning materials using metal oxide resist (MOR)
Publication type
Proceedings paper