Publication:

Novel processing technologies for advanced EUV patterning materials using metal oxide resist (MOR)

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2583809

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Author(s)

Onitsuka, Tomoya

;

Kawakami, Shinichiro

;

Dauendorffer, Arnaud

;

Shimura, Satoru

;

Nafus, Kathleen

;

Feurprier, Yannick

;

Foubert, Philippe

;

De Simone, Danilo

Journal

Proceedings of SPIE

Statistics

1455 since deposited on 2021-11-02

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Acq. date: 2026-02-25