Publication:

Novel processing technologies for advanced EUV patterning materials using metal oxide resist (MOR)

Date

2021
Proceedings Paper
https://doi.org/10.1117/12.2583809
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Onitsuka, Tomoya
;
Kawakami, Shinichiro
;
Dauendorffer, Arnaud
;
Shimura, Satoru
;
Nafus, Kathleen
;
Feurprier, Yannick
;
Foubert, Philippe  
;
De Simone, Danilo  

Journal

Proceedings of SPIE

Abstract

Description

Metrics

Views

1451 since deposited on 2021-11-02
1last month
Acq. date: 2025-12-11

Citations

Metrics

Views

1451 since deposited on 2021-11-02
1last month
Acq. date: 2025-12-11

Citations