Browsing by author "Van Dijk, Leon"
Now showing items 1-6 of 6
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Intra-field stress impact on global wafer deformation
van Haren, Richard; Otten, Ronald; Singh, Subodh; Singh, Amandev; Van Dijk, Leon; Owen, David; Anberg, Doug; Mileham, Jeffrey; Gu, Yajun; Hermans, Jan (2019) -
On product overlay characterization after stressed layer etch
van Haren, Richard; Mouraille, Orion; Yildirim, Oktay; Van Dijk, Leon; Kumar, Kaushik; Feurprier, Yannick; Hermans, Jan (2021) -
The impact of the reticle and wafer alignment mark placement accuracy on the intra-field mask-to-mask overlay
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; D'have, Koen; Van Dijk, Leon; Hermans, Jan; Beyer, Dirk (2019) -
The impact of the reticle and wafer alignment mark placement accuracy on the intra-field mask-to-mask overlay
Mouraille, Orion; van Haren, Richard; Steinert, Steffen; D'have, Koen; Van Dijk, Leon; Hermans, Jan; Beyer, Dirk (2019) -
Wafer alignment mark placement accuracy impact on the layer to layer overlay performance
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; D'have, Koen; Van Dijk, Leon; Hermans, Jan; Beyer, Dirk (2019) -
Wafer shape based in-plane distortion predictions using superfast 4G metrology
Van Dijk, Leon; Mileham, Jeffrey; Malakhovsky, Ilja; Laidler, David; Dekkers, Harold; Van Elshocht, Sven; Anberg, Doug; Owen, David M.; van Haren, Richard (2017)