Browsing by author "Maslow, Mark John"
Now showing items 1-4 of 4
-
Impact of local variability on defect-aware process windows
Maslow, Mark John; Yaegashi, Hidetami; Frommhold, Andreas; Schiffelers, Guido; Wahlisch, Felix; Rispens, Gijsbert; Slachter, Bram; Yoshida, Keisuke; Hara, Arisa; Oikawa, Noriaki; Pathak, Abhinav; Cerbu, Dorin; Hendrickx, Eric; Bekaert, Joost (2019) -
Improving exposure latitude and aligning best focus through pitch by curing M3D effects with controlled aberrations
Franke, Joern-Holger; Bekaert, Joost; Blanco, Victor; Van Look, Lieve; Wahlisch, Felix; Lyakhova, Kateryna; Van Adrichem, Paul; Maslow, Mark John; Schiffelers, Guido; Hendrickx, Eric (2019) -
Spatial frequency breakdown of CD variation
Kovalevich, Tatiana; Witek, Barbara; Riggs, Daniel; Bekaert, Joost; Van Look, Lieve; Maslow, Mark John (2022) -
Understanding the significance of local variability in defect-aware process windows
Maslow, Mark John; Yaegashi, Hidetami; Frommhold, Andreas; Hara, Arisa; Cerbu, Dorin (2020)