Understanding the significance of local variability in defect-aware process windows

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Authors

Maslow, Mark John; Yaegashi, Hidetami; Frommhold, Andreas; Hara, Arisa; Cerbu, Dorin

ISSN

0894-6507

Issue

1

Journal

IEEE Transactions on Semiconductor Manufacturing

Volume

33

Title

Understanding the significance of local variability in defect-aware process windows

Publication type

Journal article

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