Publication:
Understanding the significance of local variability in defect-aware process windows
Date
| dc.contributor.author | Maslow, Mark John | |
| dc.contributor.author | Yaegashi, Hidetami | |
| dc.contributor.author | Frommhold, Andreas | |
| dc.contributor.author | Hara, Arisa | |
| dc.contributor.author | Cerbu, Dorin | |
| dc.contributor.imecauthor | Frommhold, Andreas | |
| dc.contributor.imecauthor | Cerbu, Dorin | |
| dc.contributor.orcidimec | Frommhold, Andreas::0000-0001-6824-5643 | |
| dc.date.accessioned | 2021-10-29T00:36:21Z | |
| dc.date.available | 2021-10-29T00:36:21Z | |
| dc.date.issued | 2020 | |
| dc.identifier.issn | 0894-6507 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35557 | |
| dc.identifier.url | https://ieeexplore.ieee.org/document/8935432 | |
| dc.source.beginpage | 42 | |
| dc.source.endpage | 52 | |
| dc.source.issue | 1 | |
| dc.source.journal | IEEE Transactions on Semiconductor Manufacturing | |
| dc.source.volume | 33 | |
| dc.title | Understanding the significance of local variability in defect-aware process windows | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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