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Understanding the significance of local variability in defect-aware process windows
Publication:
Understanding the significance of local variability in defect-aware process windows
Date
2020
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maslow, Mark John
;
Yaegashi, Hidetami
;
Frommhold, Andreas
;
Hara, Arisa
;
Cerbu, Dorin
Journal
IEEE Transactions on Semiconductor Manufacturing
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2071
since deposited on 2021-10-29
420
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
2071
since deposited on 2021-10-29
420
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations