Browsing by author "Verheyden, Kurt"
Now showing items 1-5 of 5
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Emissivity independent heating of 3D patterns
Vanormelingen, Koen; Granneman, Ernst; Terhorst, Huub; Rosseel, Erik; Verheyden, Kurt (2007) -
Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Machkaoutsan, Vladimir; Mertens, Sofie; Bauer, R.; Lauwers, Anne; Verheyden, Kurt; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Caymax, Matty; Jakschik, Stefan; Theodore, D.; Absil, Philippe; Thomas, S.; Granneman, E.H.A. (2007) -
Observation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structures
Brunco, David; Opsomer, Karl; De Jaeger, Brice; Winderickx, Gillis; Verheyden, Kurt; Meuris, Marc (2008) -
Pattern-dependent heating of 3D structures
Granneman, Ernst; Pages, Xavier; Terhorst, Huub; Verheyden, Kurt; Vanormelingen, Koen; Rosseel, Erik (2007) -
Widening of FUSI RTP process window by spike anneal
Lauwers, Anne; Mertens, Sofie; Absil, Philippe; Chiarella, Thomas; Hoffmann, Thomas; Kubicek, Stefan; de Marneffe, Jean-Francois; Brijs, Bert; Vrancken, Christa; Biesemans, Serge; Kittl, Jorge; Verheyden, Kurt; Vanormelingen, Koen; Granneman, Ernst (2007)