Browsing by author "Crossley, A."
Now showing items 1-3 of 3
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Critical processes for ultra-thin gate oxide integrity
Depas, Michel; Heyns, Marc; Nigam, Tanya; Kenis, Karine; Sprey, Hessel; Wilhelm, H.; Wilhelm, Rudi; Crossley, A.; Sofield, C. J.; Gräf, D. (1996) -
Microroughness of clean silicon surfaces and gate oxide breakdown
Depas, Michel; Crossley, A.; Vermeire, Bert; Mertens, Paul; Sofield, C. J.; Heyns, Marc (1995) -
Ultra thin gate oxide technology and reliability
Heyns, Marc; Depas, Michel; Teerlinck, Ivo; Meuris, Marc; Mertens, Paul; Vanhellemont, Jan; Mouche, Laurent; Nigam, Tanya; Wilhelm, Rudi; Knotter, Martin; Wolke, K.; Crossley, A.; Sofield, C. J.; Gräf, D. (1996)