Browsing by author "Usman Ibrahim, Ansar"
Now showing items 1-8 of 8
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An improved CMP process for integration of high mobility channel materials
Teugels, Lieve; Ong, Patrick; Usman Ibrahim, Ansar; Delande, Tinne; Bhonsle, Rithu; Siebert, Max; Garcia Romero, Ivan; Struyf, Herbert; Leunissen, Leonardus (2016) -
Ge, III/V Materials CMP
Ong, Patrick; Lan, Yongqing; Noller, Bastian; Gillot, Christophe; Usman Ibrahim, Ansar; Lauter, Michael; Golzarian, Reza; Li, Yuzhuo (2012) -
III/V CMP process development
Ong, Patrick; Usman Ibrahim, Ansar; Gillot, Christophe; Lan, Yongqing; Teugels, Lieve; Waldron, Niamh; Proelss, Julian (2013) -
Improving defectivity for III-V CMP processes for < 10 NM technology nodes
Teugels, Lieve; Ong, Patrick; Waldron, Niamh; Boccardi, Guillaume; Usman Ibrahim, Ansar; Siebert, Max; Leunissen, Leonardus (2014) -
Improving defectivity for III-V CMP processes for <10 nm technology nodes
Teugels, Lieve; Ong, Patrick; Boccardi, Guillaume; Waldron, Niamh; Usman Ibrahim, Ansar; Siebert, Joerg Max; Leunissen, Leonardus A.H. (2014) -
Inspection, characterization and classification of defects for improved CMP of III-V materials
Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, S; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus (2015) -
Inspection, characterization and classification of defects for improved CMP of III-V materials
Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, Sitaraman; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus (2015) -
Wet-chemical cleaning of cobalt and molybdenum for advanced interconnects
Le, Quoc Toan; Kesters, Els; Usman Ibrahim, Ansar; Klipp, Andreas; Pacco, Antoine; van der Veen, Marleen; Altamirano Sanchez, Efrain; Holsteyns, Frank (2020)