Browsing by author "Pamidighantam, Sayanu"
Now showing items 1-7 of 7
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A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
Pamidighantam, Sayanu; Laureyn, Wim; Salah, Ahmed; Verbist, Agnes; Tilmans, Harrie (2002) -
A wet release process for fabricating slender and compliant suspended micro-mechanical structures
Pamidighantam, Sayanu; Laureyn, Wim; Rusu, Cristina; Baert, Kris; Puers, Bob; Tilmans, Harrie (2003) -
Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices
Jourdain, Anne; De Moor, Piet; Pamidighantam, Sayanu; Tilmans, Harrie (2002) -
Metal and polySi (Ge) micromechanical devices for high frequency application
Pamidighantam, Sayanu; Jansen, Henri; Verbist, Agnes; Tilmans, Harrie; Baert, Kris; Puers, Bob (2000) -
Micromachined devices for space telecom applications
Jansen, Henri; Pamidighantam, Sayanu; De Raedt, Walter; Beccarini, Giuseppe; Di Monaco, Orsola; Baert, Kris; Tilmans, Harrie (2000) -
Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions
Pamidighantam, Sayanu; Puers, Bob; Baert, Kris; Tilmans, Harrie (2002) -
Pull-in voltage analysis of fixed-fixed beams
Pamidighantam, Sayanu; Puers, Bob; Tilmans, Harrie (2001)