Browsing by author "Ljazouli, Rami"
Now showing items 1-3 of 3
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Low damage cryogenic etching of porous organosilicate low-k materials using SF6/O2/SiF4
Zhang, Liping; Ljazouli, Rami; Lefaucheux, Philippe; Tillocher, Thomas; Dussart, Remi; Mankelevich, Yuri; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl (2013) -
Study of damage caused by non-reactive Ar plasma on an organic low-k material
de Marneffe, Jean-Francois; Ljazouli, Rami; Souriau, Laurent; Zhang, Liping; Wilson, Chris; Baklanov, Mikhaïl (2012) -
Study of ion and VUV effects on self-assembled organic low-k material exposed to argon plasma
de Marneffe, Jean-Francois; Ljazouli, Rami; Souriau, Laurent; Zhang, Liping; Lee, Hsiang-Yun; Wilson, Chris; Baklanov, Mikhaïl (2012)