Browsing by author "Blavier, G."
Now showing items 1-5 of 5
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Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with other established techniques
Loo, Roger; Caymax, Matty; Libezny, Milan; Blavier, G.; Brijs, Bert; Geenen, Luc; Vandervorst, Wilfried (2000) -
Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS
Loo, Roger; Caymax, Matty; Libezny, Milan; Blavier, G.; Brijs, Bert; Geenen, Luc; Vandervorst, Wilfried (1999) -
Impact of dummy metal structures on post oxide CMP planarization
Gillot, Christophe; De Backer, E.; Grillaert, Joost; Heylen, Nancy; Vaca, L. M.; Blavier, G. (1999) -
In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Loo, Roger; Sleeckx, Erik; Caymax, Matty; Blavier, G.; Kremer, Stephanie (2001) -
In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometry and comparison with other established techniques
Loo, Roger; Caymax, Matty; Blavier, G.; Kremer, Stephanie (2001)