Browsing by author "Bennett, J."
Now showing items 1-6 of 6
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Charge trapping and electron mobility degradation in MOCVD hafnium silicate gate dielectric stack structures
Young, C.D.; Kerber, Andreas; Hou, T.H.; Cartier, Eduard; Brown, G.A.; Bersuker, G.; Kim, Y.; Lim, C.; Gutt, J.; Lysaght, P.; Bennett, J.; Lee, C.H.; Gopalan, S.; Gardner, M.; Zeitzoff, P.; Groeseneken, Guido; Murto, R.W.; Huff, H.R. (2004) -
Charge trapping and mobility degradation in MOCVD hafnium silicate gate dielectric stack structures
Young, C.D.; Kerber, Andreas; Hou, T.H.; Cartier, E.; Brown, G.A.; Bersuker, G.; Kim, Y.; Lim, C.; Gutt, J.; Lysaght, P.; Bennett, J.; Lee, C.H.; Gopalan, S.; Gardner, M.; Zeitzoff, P.; Groeseneken, Guido; Murto, R.W.; Huff, H.R. (2003) -
On the reliability of SIMS depth profiles through HfO2-stacks
Vandervorst, Wilfried; Bennett, J.; Huyghebaert, Cedric; Conard, Thierry; Gondran, C.; De Witte, Hilde (2004) -
Progress towards an electrically active, ultra-shallow junction depth reference for carrier illumination, SRP and SIMS
Borden, P.; Bechtler, L.; Klemme, B.; Nijmeijer, R.; Judge, E.; Diebold, A.; Bennett, J.; Vandervorst, Wilfried; Clarysse, Trudo; Caymax, Matty; Peytier, Ivan (2001) -
Sputter rate variations in silicon under high-k dielectric films
Bennett, J.; Beebe, M.; Sparks, C.; Gondran, C.; Vandervorst, Wilfried (2004-05) -
Sputter rate variations in silicon under high-k dielectric films
Bennett, J.; Beebe, M.; Sparks, C.; Gondran, C.; Vandervorst, Wilfried (2004)