Browsing by author "Lee, Jae Woo"
Now showing items 21-26 of 26
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Phosphorus doped SiC source drain and SiGe channel for scaled bulk FinFETs
Togo, Mitsuhiro; Lee, Jae Woo; Pantisano, Luigi; Chiarella, Thomas; Ritzenthaler, Romain; Krom, Raymond; Hikavyy, Andriy; Loo, Roger; Rosseel, Erik; Brus, Stephan; Maes, J.W.; Machkaoutsan, Vladimir; Tolle, J.; Eneman, Geert; De Keersgieter, An; Boccardi, Guillaume; Mannaert, Geert; Altamirano Sanchez, Efrain; Locorotondo, Sabrina; Demand, Marc; Horiguchi, Naoto; Thean, Aaron (2012) -
Plasma doping and reduced crystalline damage for conformally doped fin feld effect transistors
Lee, Jae Woo; Sasaki, Yuichiro; Cho, Moon Ju; Boccardi, Guillaume; Ritzenthaler, Romain; Eneman, Geert; Chiarella, Thomas; Brus, Stephan; Horiguchi, Naoto; Groeseneken, Guido; Thean, Aaron (2013) -
Replacement metal gate/high-k last technology for aggressively scaled planar and FinFET-based devices
Veloso, Anabela; Lee, Jae Woo; Simoen, Eddy; Ragnarsson, Lars-Ake; Arimura, Hiroaki; Cho, Moon Ju; Boccardi, Guillaume; Thean, Aaron; Horiguchi, Naoto (2014) -
Replacement metal gate/high-k last technology for aggressively scaled planar and FinFET-based devices
Veloso, Anabela; Lee, Jae Woo; Simoen, Eddy; Ragnarsson, Lars-Ake; Arimura, Hiroaki; Cho, Moon Ju; Boccardi, Guillaume; Thean, Aaron; Horiguchi, Naoto (2014) -
Sidewall crystalline orientation effect on post-treatments for a replacement metal gate bulk fin field effect transistor
Lee, Jae Woo; Simoen, Eddy; Veloso, Anabela; Cho, Moon Ju; Boccardi, Guillaume; Ragnarsson, Lars-Ake; Chiarella, Thomas; Horiguchi, Naoto; Groeseneken, Guido; Thean, Aaron (2013) -
Thermal and SF6-plasma treatments for improved (sub-)1nm EOT planar and FinFET-based RMG high-k last devices and enabling a simplified scalable CMOS integration scheme
Veloso, Anabela; Boccardi, Guillaume; Ragnarsson, Lars-Ake; Higuchi, Yuichi; Arimura, Hiroaki; Lee, Jae Woo; Simoen, Eddy; Cho, Moon Ju; Roussel, Philippe; Paraschiv, Vasile; Shi, Xiaoping; Schram, Tom; Chew, Soon Aik; Brus, Stephan; Dangol, Anish; Vecchio, Emma; Sebaai, Farid; Kellens, Kristof; Heylen, Nancy; Devriendt, Katia; Dekkers, Harold; Van Ammel, Annemie; Witters, Thomas; Conard, Thierry; Vaesen, Inge; Richard, Olivier; Bender, Hugo; Athimulam, Raja; Chiarella, Thomas; Thean, Aaron; Horiguchi, Naoto (2013)