Authors

Lee, Jae Woo; Sasaki, Yuichiro; Cho, Moon Ju; Boccardi, Guillaume; Ritzenthaler, Romain; Eneman, Geert; Chiarella, Thomas; Brus, Stephan; Horiguchi, Naoto; Groeseneken, Guido; Thean, Aaron

ISSN

0003-6951

Issue

22

Journal

Applied Physics Letters

Volume

102

Title

Plasma doping and reduced crystalline damage for conformally doped fin feld effect transistors

Publication type

Journal article

Embargo date

9999-12-31