Publication:

Plasma doping and reduced crystalline damage for conformally doped fin feld effect transistors

Date

2013

Journal article

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Files

26938.pdf 1.34 MB

Author(s)

;

Sasaki, Yuichiro

;

;

Boccardi, Guillaume

;

Ritzenthaler, Romain

;

;

Chiarella, Thomas

;

;

Horiguchi, Naoto

;

Groeseneken, Guido

;

Journal

Applied Physics Letters

Statistics

1937 since deposited on 2021-10-21

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Acq. date: 2026-06-02