Plasma doping and reduced crystalline damage for conformally doped fin feld effect transistors

Lee, Jae Woo; Sasaki, Yuichiro; Cho, Moon Ju; Boccardi, Guillaume; Ritzenthaler, Romain; Eneman, Geert; Chiarella, Thomas; Brus, Stephan; Horiguchi, Naoto; Groeseneken, Guido; Thean, Aaron

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Plasma doping and reduced crystalline damage for conformally doped fin feld effect transistors

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2013

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Applied Physics Letters

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Plasma doping and reduced crystalline damage for conformally doped fin feld effect transistors

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