Browsing by author "Cheng, Shaunee"
Now showing items 21-40 of 79
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Current status of 193 nm immersion lithography and outlook to the future
Ronse, Kurt; Cheng, Shaunee; Ercken, Monique; Leunissen, Peter; Maenhoudt, Mireille; Vandenberghe, Geert; Van den hove, Luc (2005) -
Design technology co-optimization for N10
Ryckaert, Julien; Raghavan, Praveen; Baert, Rogier; Garcia Bardon, Marie; Dusa, Mircea; Mallik, Arindam; Sakhare, Sushil; Vandewalle, Boris; Wambacq, Piet; Chava, Bharani; Croes, Kris; Dehan, Morin; Jang, Doyoung; Leray, Philippe; Liu, Tsung-Te; Miyaguchi, Kenichi; Parvais, Bertrand; Schuddinck, Pieter; Weemaes, Philippe; Mercha, Abdelkarim; Boemmels, Juergen; Horiguchi, Naoto; McIntyre, Greg; Thean, Aaron; Tokei, Zsolt; Cheng, Shaunee; Verkest, Diederik; Steegen, An (2014) -
Detection of split design-related weak points in double patterning using PQW and bright-field defect inspection
Van Den Heuvel, Dieter; Cheng, Shaunee; Leray, Philippe; Wiaux, Vincent; Maenhoudt, Mireille; D'have, Koen; Jaenen, Patrick; Marcuccilli, Gino; Malik, Irfan; Klein, Sophie (2008) -
Diffraction based overlay metrology in the framework of double patterning
Leray, Philippe; Cheng, Shaunee (2008) -
Diffraction based overlay metrology: accuracy and performance on front end stack
Leray, Philippe; Cheng, Shaunee; Kandel, Daniel; Adel, Mike; Marchelli, Anat; Vakshtein, Irina; Vasconi, Mauro; Salski, Bartlomiej (2008) -
Diffraction based overlay re-assessed
Leray, Philippe; Laidler, David; D'have, Koen; Cheng, Shaunee (2011) -
Double litho, double etch (LELE) process challenges for 22nm HP and beyond
Maenhoudt, Mireille; Wiaux, Vincent; Cheng, Shaunee; Vandenberghe, Geert; Ronse, Kurt (2008) -
Double patterning for 32-nm and below: an update
Finders, Jo; Dusa, Mircea; Vleeming, Bert; Hepp, Birgitt; Megens, Henry; Maenhoudt, Mireille; Cheng, Shaunee; Vandeweyer, Tom (2008) -
Double patterning lithography for 32 nm: critical dimensions uniformity and overlay control considerations
Finders, Jo; Dusa, Mircea; Vleeming, Bert; Hepp, Birgitt; Maenhoudt, Mireille; Cheng, Shaunee; Vandeweyer, Tom (2009) -
Double patterning: from split to process control
Wiaux, Vincent; Ercken, Monique; Maenhoudt, Mireille; Cheng, Shaunee (2007) -
Electrical linewidth metrology for sub-65-nm applications
Storms, Greet; Cheng, Shaunee; Pollentier, Ivan (2004) -
EUV process sensitivities and optimizations for track processing
Shite, Hideo; Bradon, Neil; Nafus, Kathleen; Kitano, Junichi; Kosugi, Hitoshi; Hermans, Jan; Hendrickx, Eric; Foubert, Philippe; Gronheid, Roel; Jehoul, Christiane; Van Den Heuvel, Dieter; Goethals, Mieke; Cheng, Shaunee (2010) -
Evaluation of roughness transfer from Litho to Etch using CD-SEM
Tanaka, Motohiro; Ishimoto, Toru; Kazumi, H.; Cheng, Shaunee (2012) -
Extreme scaling of optical lithography: overview of process integration issues
Ronse, Kurt; Wiaux, Vincent; Verhaegen, Staf; Van Look, Lieve; Bekaert, Joost; Laidler, David; Cheng, Shaunee; Maenhoudt, Mireille; Vandenberghe, Geert; Dusa, Mircea (2009) -
Focus and dose de-convolution technique for improved CD-control of immersion clusters
Charley, Anne-Laure; D'have, Koen; Leray, Philippe; Laidler, David; Cheng, Shaunee; Dusa, Mircea; Hinnen, Paul; Vanoppen, Peter (2010) -
Further investigation of EUV process sensitivities for wafer track processing
Bradon, Neil; Nafus, Kathleen; Shite, Hideo; Kitano, J.; Kosugi, H.; Goethals, Mieke; Cheng, Shaunee; Hermans, Jan; Hendrickx, Eric; Baudemprez, Bart; Van Den Heuvel, Dieter (2010) -
Further study on the verification of CD-SEM based monitoring for hyper NA lithography
Ishimoto, Toru; Osaki, M.; Sekiguchi, Kohei; Hasegawa, N.; Watanabe, K.; Laidler, David; Cheng, Shaunee (2008) -
High speed optical metrology solution for after etch process monitoring and control
Charley, Anne-Laure; Leray, Philippe; Pypen, Wouter; Cheng, Shaunee; Verma, Alok; Mattheus, Christine; Wisse, Baukje; Cramer, Hugo; Niesing, Henk; Kruijswijk, Stefan (2014) -
High-speed full 3D feature metrology for litho monitoring, matching and model calibration with scatterometry
Cramer, H.; Chen, An; Li, Frank; Leray, Philippe; Charley, Anne-Laure; Van Look, Lieve; Bekaert, Joost; Cheng, Shaunee (2012) -
Immersion specific error contributions to overlay control
D'have, Koen; Laidler, David; Cheng, Shaunee (2008)