Browsing by author "Xu, Kaidong"
Now showing items 21-40 of 64
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Etch development for E-mode GaN power HEMT fabrication
Mannaert, Geert; Posthuma, Niels; De Jaeger, Brice; Van Hove, Marleen; Xu, Kaidong; Decoutere, Stefaan; Paraschiv, Vasile (2014) -
Etching of Co-Pd with significantly reduced sidewall re-deposition
Radisic, Dunja; Nishimura, Eiichi; Kushibiki, Masato; Wataru, Shimizu; Tahara, Shigeru; Xu, Kaidong; Kim, Woosik; Boullart, Werner (2013) -
Evaluation of megasonic cleaning for particle removal efficiency and damaging
Vereecke, Guy; Holsteyns, Frank; Xu, Kaidong; Lux, Marcel; Vos, Rita; Mertens, Paul; Loper, S.; Grothe, P. (2003) -
Fundamental study of the removal mechanisms of nano-sized particles using brush scrubber cleaning
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Doumen, Geert; Fyen, Wim; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, J.; Kovacs, F. (2005) -
Gate double patterning strategies for 10nm node FinFET devices
Hody, Hubert; Paraschiv, Vasile; Hellin, David; Vandeweyer, Tom; Boccardi, Guillaume; Xu, Kaidong (2014) -
Implementing plasma texturing process with linear microwave plasma sources for ultra-thin multi-crytalline (<150um) solar cells
Chan, BT; Kunnen, Eddy; Uhlig, Matthias; Xu, Kaidong; Boullart, Werner; Rau, Bernd; Poortmans, Jef (2011) -
Integration of a k=2.3 spin-on polymer for the sub-28nm technology node
Wilson, Chris; Lazzarino, Frederic; Truffert, Vincent; Kirimura, Tomoyuki; de Marneffe, Jean-Francois; Verdonck, Patrick; Hirai, M.; Nakatani, K.; Tada, M.; Heylen, Nancy; El-Mekki, Zaid; Vanstreels, Kris; Van Besien, Els; Ciofi, Ivan; Stucchi, Michele; Croes, Kristof; Zhang, Liping; Demuynck, Steven; Ercken, Monique; Xu, Kaidong; Baklanov, Mikhaïl; Tokei, Zsolt (2012) -
Interconnects scaling challenge for sub-20nm spin torque transfer magnetic random access memory technology
Min, Tai; Tokei, Zsolt; Kar, Gouri Sankar; Cosemans, Stefan; Bekaert, Joost; Raghavan, Praveen; Cornelissen, Sven; Xu, Kaidong; Souriau, Laurent; Radisic, Dunja; Swerts, Johan; Tahmasebi, Taiebeh; Mertens, Sofie (2014) -
Issues associated with cleaning of nanosize particles
Fyen, Wim; Vereecke, Guy; Xu, Kaidong; Lauerhaas, J.; Holsteyns, Frank; Vos, Rita; Mertens, Paul (2003) -
Key contributors for improvement of line width roughness, line edge roughness, and critical dimension uniformity: 15 nm half-pitch patterning with extreme ultraviolet and self-aligned double patterning
Xu, Kaidong; Souriau, Laurent; Hellin, David; Versluijs, Janko; Wong, Patrick; Vangoidsenhoven, Diziana; Vandenbroeck, Nadia; Dekkers, Harold; Shi, Xiaoping; Albert, Johan; Tan, Chi Lim; Vertommen, Johan; Coenegrachts, Bart; Orain, Isabelle; Kimura, Yoshie; Wiaux, Vincent; Boullart, Werner (2013-09) -
Measurement of nanoparticles on silicon wafer surface using haze signal by light scattering
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Holsteyns, Frank; Kraus, H.; Mertens, Paul; Vinckier, Chris; Kovacs, F. (2005) -
Mechanisms of particle removal during brush scrubber cleaning
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Mertens, Paul; Heyns, Marc; Vinckier, Chris (2003) -
Mechanisms of particle removal during brush scrubber cleaning
Xu, Kaidong; Vos, Rita; Vereecke, Guy; Mertens, Paul; Heyns, Marc; Vinckier, Chris; Fransaer, Jan (2004) -
Modifications of porous low-k by plasma treatments and wet cleans
Xu, Kaidong; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Lux, Marcel; Henry, Sally-Ann; Kraus, Harald; Archer, L.; Mertens, Paul; Kovacs, F; Dalmer, M; Gaulhofer, E; Luo, S.J.; Han, Q.Y.; Berry, I. (2007) -
N10 logic patterning
Xu, Kaidong; Tao, Zheng; Hody, Hubert; Mannaert, Geert; Kunnen, Eddy; Mao, Ming; Lazzarino, Frederic; Decoster, Stefan (2014) -
N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasma
Tao, Zheng; Vos, Ingrid; Altamirano Sanchez, Efrain; Xu, Kaidong; Hellin, David; Camerotto, Elisabeth; Jumel, Helene; Titus, Monica (2014) -
Nano-sized particles: quantification and removal by brush scrubber cleaning
Xu, Kaidong (2004-12) -
On-chip magnetic particle transport: where physics, chemistry and biology meet
Wirix-Speetjens, Roel; Fyen, Wim; Xu, Kaidong; De Boeck, Jo; Borghs, Gustaaf (2005) -
Optimization of a brush scrubber for nano-particles
Xu, Kaidong; Vos, Rita; Arnauts, Sophia; Schaetzlein, W.; Speh, U.; Mertens, Paul; Heyns, Marc (2001) -
Optimization of a brush scrubber for nano-sized particles
Xu, Kaidong; Vos, Rita; Arnauts, Sophia; Lux, Marcel; Schaetzlein, W.; Speh, U.; Mertens, Paul; Heyns, Marc; Vinckier, Chris (2002)