N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasma

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Authors
Tao, Zheng; Vos, Ingrid; Altamirano Sanchez, Efrain; Xu, Kaidong; Hellin, David; Camerotto, Elisabeth; Jumel, Helene; Titus, Monica
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasma
Publication type
Meeting abstract
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