Browsing by author "Lucas, Kevin"
Now showing items 21-28 of 28
-
Mighty hight-t lithography for 65nm generation contacts
Conley, Will; Montgomery, Patrick; Lucas, Kevin; Litt, Lloyd C.; Maltabes, John G.; Dieu, Laurent; Hughes, Gregory P,; Mellenthin, David L.; Socha, Robert J.; Fanucchi, Eric L.; Verhappen, Arjan; Wampler, Kurt E.; Yu, Linda; Schaefer, Erika; Cassel, Shawn; Kuijten, Jan P.; Pijnenburg, Wil; Wiaux, Vincent; Vandenberghe, Geert (2003) -
Model based OPC for 1st generation 193-nm lithography
Lucas, Kevin; Word, James; Vandenberghe, Geert; Verhaegen, Staf; Jonckheere, Rik (2001) -
Model-based design improvements for the 100nm lithography generation
Lucas, Kevin; Postnikov, Sergei; Patterson, Kyle; Yuan, Min-Chi; Thomas, Carla; Thompson, Matt; Carter, Rusty; Litt, Lloyd; Montgomery, Patrick; Wimmer, Karl (2002) -
Patterning process exploration of metal 1 layer in 7nm node with 3D pattering flow simulations
Gao, Weimin; Ciofi, Ivan; Saad, Yves; Matagne, Philippe; Bachman, Michael; Oulmane, Mohamed; Gillijns, Werner; Lucas, Kevin; Demmerle, Wolfgang; Schmoeller, Thomas (2015) -
Physical design and mask synthesis considerations for DPT
Lucas, Kevin; Cork, Chris; Hapli, John; Miloslavsky, Alex; Wiaux, Vincent; Verhaegen, Staf (2008) -
Physical design and mask synthesis considerations for DPT
Lucas, Kevin; Cork, Chris; Hapli, John; Miloslavsky, Alex; Wiaux, Vincent; Verhaegen, Staf (2008) -
Printability verification for double-patterning technology
Luk-Pat, Gerard; Panaite, Petrisor; Lucas, Kevin; Cork, Christopher; Wiaux, Vincent; Verhaegen, Staf; Maenhoudt, Mireille (2008) -
Process, design and optical proximity correction requirements for the 65nm device generation
Lucas, Kevin; Montgomery, Patrick; Litt, Lloyd C.; Conley, Will; Postnikov, Sergei V.; Wu, Wei; Yuan, Chi-Min; Olivares, Marc; Strozewski, Kirk; Carter, Russell L.; Vasek, James; Smith, David; Fanucchi, Eric L.; Wiaux, Vincent; Vandenberghe, Geert; Toublan, Olivier; Verhappen, Arjan; Kuijten, Jan P.; van Wingerden, Johannes; Kasprowicz, Bryan S.; Tracy, Jeffrey W.; Progler, Christopher J.; Shiro, Eugene; Topouzov, Igor; Wimmer, Karl; Roman, Bernard J. (2003)