Browsing by author "Hernandez, Jose Luis"
Now showing items 21-29 of 29
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Oxide CMP as a test vehicle for defectivity during CMP with composite polymer core – silica shell abrasives designed for scratch reduction during Cu CMP
Armini, Silvia; Moinpour, Mansour; Whelan, Caroline; Maex, Karen; Hernandez, Jose Luis (2007) -
Process integration towards i-PERL structure
Allebe, Christophe; Schlenker, Eva; Hernandez, Jose Luis; Aleman, Monica; Prajapati, Victor; Van Nieuwenhuysen, Kris; Janssens, Tom; Lorenz, Anne; Vermang, Bart; Uruena De Castro, Angel; Rosseel, Erik; John, Joachim; Baert, Kris; Poortmans, Jef (2010) -
Scaling of the Cu(Al) seed layer thickness and its impact on the specific resistivity of sub-100 nm lines
Carbonell, Laure; Volders, Henny; Haider, A.; Heylen, Nancy; Richard, Olivier; Palmans, Roger; Travaly, Youssef; Tokei, Zsolt; Boelen, Pieter; Rosenfeld, A.; Mandrekar, T.; Hernandez, Jose Luis; Vanhaelemeersch, Serge (2007) -
Surface properties restoration and passivation of high porosity ultra low-k dielectric (k~2.3) after direct-CMP
Sinapi, Fabrice; Heylen, Nancy; Travaly, Youssef; Vereecke, Guy; Baklanov, Mikhaïl; Kesters, Els; Van Hoeymissen, Jan; Hernandez, Jose Luis; Beyer, Gerald; Fisher, P. (2007) -
The critical role of the metal / porous low-k interface in post direct CMP defectivity generation and resulting ULK surface and bulk hydrophilisation
Travaly, Youssef; Sinapi, Fabrice; Heylen, Nancy; Humbert, Aurelie; Delande, Tinne; Caluwaerts, Rudy; Gueneau de Mussy, Jean Paul; Vereecke, Guy; Baklanov, Mikhaïl; Iacopi, Francesca; Hernandez, Jose Luis; Beyer, Gerald; Fischer, Pamela (2007) -
The i-module approach: Towards improved performance and reliability of photovoltaic modules
Govaerts, Jonathan; Labie, Riet; Hernandez, Jose Luis; Gonzalez, Mario; Beaucarne, Guy; Dewallef, Stefan; van der Heide, Arvid; Vanfleteren, Jan; Gordon, Ivan; Baert, Kris (2011) -
The influence of the selectivity in a 2nd step slurry for a Cu CMP process
Sijmus, Bram; Vos, Ingrid; Terzieva, Valentina; Meuris, Marc; Hernandez, Jose Luis (2002) -
The way towards front side metallization by copper-plating: what we can learn from microelectronics
Hernandez, Jose Luis; Aleman, Monica; Allebe, Christophe; Bearda, Twan; John, Joachim; Kuzma Filipek, Izabela; Philipsen, Harold; Posthuma, Niels; Prajapati, Victor; Rodet, Simon; Poortmans, Jef (2010) -
Towards 20.5% efficiency PERC Cells by improved understanding through simulation
Van Wichelen, Koen; Tous, Loic; Allebe, Christophe; Janssens, Tom; Choulat, Patrick; Hernandez, Jose Luis; Cornagliotti, Emanuele; Debucquoy, Maarten; Verlinden, Pierre; Dross, Frederic; Baert, Kris (2011)