Nanoscale imaging and x-ray spectroscopy of electrically active defects in ultra thin dielectrics on silicon

dc.contributor.author	Bernardini, S.
dc.contributor.author	Ishii, M.
dc.contributor.author	Whittaker, E.
dc.contributor.author	Hamilton, B.
dc.contributor.author	Freeland, C.
dc.contributor.author	Poolton, N.R.J.
dc.contributor.author	De Gendt, Stefan
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-16T15:04:05Z
dc.date.available	2021-10-16T15:04:05Z
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/11720
dc.source.beginpage	2286
dc.source.endpage	2289
dc.source.issue	9_10
dc.source.journal	Microelectronic Engineering
dc.source.volume	84
dc.title	Nanoscale imaging and x-ray spectroscopy of electrically active defects in ultra thin dielectrics on silicon
dc.type	Journal article
dspace.entity.type	Publication
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