Publication:
Modelling and experimental evaluation of (post) lithography process contributions to pattern roughness
Date
| dc.contributor.author | Vaglio Pret, Alessandro | |
| dc.contributor.imecauthor | Vaglio Pret, Alessandro | |
| dc.contributor.thesisadvisor | Van den hove, Luc | |
| dc.date.accessioned | 2021-10-20T17:19:45Z | |
| dc.date.available | 2021-10-20T17:19:45Z | |
| dc.date.issued | 2012-07 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21656 | |
| dc.title | Modelling and experimental evaluation of (post) lithography process contributions to pattern roughness | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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