Publication:

High NA EUV defectivity inspection: overview and challenges

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051293

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Author(s)

Beral, Christophe

;

Van Den Heuvel, Dieter

;

Beggiato, Matteo

;

Chowrira Poovanna, Bhavishya

;

;

;

Foubert, Philippe

;

;

Demaude, Annaëlle

;

Leray, Philippe

;

Charley, Anne-Laure

Journal

Proceedings of SPIE

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67 since deposited on 2025-07-28

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Acq. date: 2026-08-10