Publication:

High NA EUV defectivity inspection: overview and challenges

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051293
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dc.contributor.authorBeral, Christophe
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorBeggiato, Matteo
dc.contributor.authorChowrira Poovanna, Bhavishya
dc.contributor.authorPaolillo, Sara
dc.contributor.authorMoussa, Alain
dc.contributor.authorFoubert, Philippe
dc.contributor.authorCerbu, Dorin
dc.contributor.authorDemaude, Annaƫlle
dc.contributor.authorLeray, Philippe
dc.contributor.authorCharley, Anne-Laure
dc.contributor.imecauthorBeral, C.
dc.contributor.imecauthorVan den Heuvel, D.
dc.contributor.imecauthorBeggiato, M.
dc.contributor.imecauthorChowrira, B.
dc.contributor.imecauthorPaolillo, S.
dc.contributor.imecauthorMoussa, A.
dc.contributor.imecauthorFoubert, P.
dc.contributor.imecauthorCerbu, D.
dc.contributor.imecauthorDemaude, A.
dc.contributor.imecauthorLeray, P.
dc.contributor.imecauthorCharley, A. L.
dc.date.accessioned2025-07-28T03:57:28Z
dc.date.available2025-07-28T03:57:28Z
dc.date.issued2025
dc.description.wosFundingTextThis work has been enabled in part by the NanoIC pilot line. The acquisition and operation are jointly funded by the Chips Joint Undertaking, through the European Union's Digital Europe (101183266) and Horizon Europe programs (101183277), as well as by the participating states Belgium (Flanders), France, Germany, Finland, Ireland and Romania. For more information, visit nanoic-project.eu.
dc.identifier.doi10.1117/12.3051293
dc.identifier.eisbn978-1-5106-8639-7
dc.identifier.isbn978-1-5106-8638-0
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45954
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage134261H-1
dc.source.conference2025 Conference on Metrology Inspection and Process Control-Annual
dc.source.conferencedate2025-02-24
dc.source.conferencelocationSan Jose
dc.source.endpage134261H-9
dc.source.journalProceedings of SPIE
dc.source.numberofpages9
dc.title

High NA EUV defectivity inspection: overview and challenges

dc.typeProceedings paper
dspace.entity.typePublication
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