Publication:
The role of fluorine with Ge pre-amorphisation in forming PMOS junctions for the 65-nm CMOS technology node
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1982 since deposited on 2021-10-15
3last month
Acq. date: 2026-08-28
Citations
Statistics
Views
1982 since deposited on 2021-10-15
3last month
Acq. date: 2026-08-28
Citations