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The role of fluorine with Ge pre-amorphisation in forming PMOS junctions for the 65-nm CMOS technology node
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1975 since deposited on 2021-10-15
Acq. date: 2025-10-23
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Metrics
Views
1975 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations