Publication:
The role of fluorine with Ge pre-amorphisation in forming PMOS junctions for the 65-nm CMOS technology node
Date
| dc.contributor.author | Pawlak, Bartek | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Surdeanu, Radu | |
| dc.contributor.author | Pagès, Xavier | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Van der Jeugd, Kees | |
| dc.contributor.imecauthor | Pawlak, Bartek | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Van der Jeugd, Kees | |
| dc.date.accessioned | 2021-10-15T06:03:59Z | |
| dc.date.available | 2021-10-15T06:03:59Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7989 | |
| dc.source.beginpage | 99 | |
| dc.source.conference | Advanced Short-Time Thermal Processing for Si-based CMOS Devices | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 104 | |
| dc.title | The role of fluorine with Ge pre-amorphisation in forming PMOS junctions for the 65-nm CMOS technology node | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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