Publication:

Dopant segregation and diffusion in CVD epitaxial Grown Ge

Date

2017

Meeting abstract

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Author(s)

Murota, Junichi

;

Yamamoto, Yuchi

;

;

Baerwolf, Florian

;

;

;

;

Douhard, Bastien

;

;

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Acq. date: 2026-09-13