Publication:

Feasability demonstration of 0.18 µm and 0.13 µm optical projection lithography based on CD control calculations

Date

1996

Proceedings Paper

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Files

1269.pdf 242.67 KB

Author(s)

;

;

;

Van den hove, Luc

Statistics

1958 since deposited on 2021-09-29

Acq. date: 2026-02-25