Publication:
Feasability demonstration of 0.18 µm and 0.13 µm optical projection lithography based on CD control calculations
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1959 since deposited on 2021-09-29
1last month
Acq. date: 2026-04-26
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Statistics
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1959 since deposited on 2021-09-29
1last month
Acq. date: 2026-04-26
Citations