Publication:

Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element

Date

2017
Meeting abstract
https://doi.org/10.1117/12.2257908
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3498-5082
cris.virtual.orcid0000-0002-7295-0254
cris.virtual.orcid0000-0001-6161-3052
cris.virtualsource.department0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7
cris.virtualsource.departmentc92c4c2a-91e9-4f73-b920-5cab982d3864
cris.virtualsource.department4cb2afed-03b7-48c8-9b18-fb0c746d3761
cris.virtualsource.orcid0cddeaa4-4a9c-44ee-a5d6-ba4f3945e8a7
cris.virtualsource.orcidc92c4c2a-91e9-4f73-b920-5cab982d3864
cris.virtualsource.orcid4cb2afed-03b7-48c8-9b18-fb0c746d3761
dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorYamaguchi, Atusko
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorInoue, Osamu
dc.contributor.authorIkata, Masami
dc.contributor.authorLorusso, Gian
dc.contributor.authorDonadio, Gabriele Luca
dc.contributor.authorYasin, Farrukh
dc.contributor.authorRao, Siddharth
dc.contributor.authorKar, Gouri Sankar
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorDonadio, Gabriele Luca
dc.contributor.imecauthorYasin, Farrukh
dc.contributor.imecauthorRao, Siddharth
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecYasin, Farrukh::0000-0002-7295-0254
dc.contributor.orcidimecRao, Siddharth::0000-0001-6161-3052
dc.date.accessioned2021-10-24T10:20:38Z
dc.date.available2021-10-24T10:20:38Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.doi10.1117/12.2257908
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29102
dc.source.beginpage101450H
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXI
dc.source.conferencedate27/02/2017
dc.source.conferencelocationSan Jose, CA USA
dc.title

Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element

dc.typeMeeting abstract
dspace.entity.typePublication
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