Publication:

Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element

Date

2017
Meeting abstract
https://doi.org/10.1117/12.2257908
Simple item page Full metadata Statistics
 
dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorYamaguchi, Atusko
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorInoue, Osamu
dc.contributor.authorIkata, Masami
dc.contributor.authorLorusso, Gian
dc.contributor.authorDonadio, Gabriele Luca
dc.contributor.authorYasin, Farrukh
dc.contributor.authorRao, Siddharth
dc.contributor.authorKar, Gouri Sankar
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorDonadio, Gabriele Luca
dc.contributor.imecauthorYasin, Farrukh
dc.contributor.imecauthorRao, Siddharth
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecYasin, Farrukh::0000-0002-7295-0254
dc.contributor.orcidimecRao, Siddharth::0000-0001-6161-3052
dc.date.accessioned2021-10-24T10:20:38Z
dc.date.available2021-10-24T10:20:38Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.doi10.1117/12.2257908
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29102
dc.source.beginpage101450H
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXI
dc.source.conferencedate27/02/2017
dc.source.conferencelocationSan Jose, CA USA
dc.title

Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
34862.pdf
Size:
934.33 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions