Publication:
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
Loading...
Journal
Abstract
Description
Statistics
Downloads
159 since deposited on 2021-11-02
18last month
5last week
Acq. date: 2026-08-08
Views
1721 since deposited on 2021-11-02
6last month
Acq. date: 2026-08-08
Citations
Statistics
Downloads
159 since deposited on 2021-11-02
18last month
5last week
Acq. date: 2026-08-08
Views
1721 since deposited on 2021-11-02
6last month
Acq. date: 2026-08-08
Citations