Publication:
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
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Acq. date: 2026-10-13
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206 since deposited on 2021-11-02
39last month
7last week
Acq. date: 2026-10-13
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1725 since deposited on 2021-11-02
4last month
Acq. date: 2026-10-13
Citations