Publication:
Multi-gate devices for the 32nm technology node and beyond: challenges for selective epitaxial growth
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1882 since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1882 since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations