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Transient clustering of reaction intermediates during wet etching of silicon nanostructures
Publication:
Transient clustering of reaction intermediates during wet etching of silicon nanostructures
Date
2017
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Aabdin, Zainul
;
Xu, XiuMei
;
Sen, Soumyo
;
Anand, Utkarsh
;
Kral, Petr
;
Holsteyns, Frank
;
Mirsaidov, Utkur
Journal
Nano Letters
Abstract
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2022
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
2022
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations