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Initial growth mechanism of atomic layer deposited TiN
Publication:
Initial growth mechanism of atomic layer deposited TiN
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Satta, Alessandra
;
Vantomme, Andre
;
Schuhmacher, Jorg
;
Whelan, Caroline
;
Sutcliffe, Victor
;
Maex, Karen
Journal
Applied Physics Letters
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1950
since deposited on 2021-10-15
Acq. date: 2026-01-26
Citations
Statistics
Views
1950
since deposited on 2021-10-15
Acq. date: 2026-01-26
Citations