Publication:
Initial growth mechanism of atomic layer deposited TiN
Date
| dc.contributor.author | Satta, Alessandra | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Schuhmacher, Jorg | |
| dc.contributor.author | Whelan, Caroline | |
| dc.contributor.author | Sutcliffe, Victor | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T16:02:05Z | |
| dc.date.available | 2021-10-15T16:02:05Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9553 | |
| dc.source.beginpage | 4571 | |
| dc.source.endpage | 4573 | |
| dc.source.issue | 22 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 84 | |
| dc.title | Initial growth mechanism of atomic layer deposited TiN | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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