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Improvement of the Ferroelectric Response of La-Doped Hafnium Zirconium Oxide Employing Tungsten Oxide Interfacial Layer with Back-End-of-Line Compatibility

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612 since deposited on 2024-08-07
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Acq. date: 2026-09-16

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612 since deposited on 2024-08-07
1last month
1last week
Acq. date: 2026-09-16

Citations