Publication:
Growth rate for the SEG of III-V compounds inside submicron STI trenches on Si (001) substrates by MOVPE: modeling and experiments
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1931 since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations
Metrics
Views
1931 since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations