Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM

Publication:

1996

Journal article

Author(s)

De Wolf, Peter

;

Trenkler, Thomas

;

Clarysse, Trudo

;

;

;

Snauwaert, J.J.

;

Hellemans, L.

Scanning Microscopy

1893 since deposited on 2021-09-29

1last month

Acq. date: 2025-12-13