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Surface characterization of InP trenches embedded in oxide using scanning probe microscopy
Publication:
Surface characterization of InP trenches embedded in oxide using scanning probe microscopy
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Date
2015
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mannarino, Manuel
;
Chintala, Ravi Chandra
;
Moussa, Alain
;
Merckling, Clement
;
Eyben, Pierre
;
Paredis, Kristof
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
Abstract
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1955
since deposited on 2021-10-22
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Acq. date: 2025-12-11
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Metrics
Views
1955
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-11
Citations