Publication:

Surface characterization of InP trenches embedded in oxide using scanning probe microscopy

Date

2015
Journal article
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cris.virtual.orcid0000-0002-6377-4199
cris.virtual.orcid0000-0003-3686-556X
cris.virtual.orcid0000-0003-3084-2543
cris.virtualsource.departmentfde8f386-0ddb-42e1-ad64-53cde7dda12d
cris.virtualsource.departmentd76d4ea6-71ac-4b8e-ae7c-533e45a0069c
cris.virtualsource.department77d06c14-6a7b-4d80-9c75-962dea483414
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dc.contributor.authorMannarino, Manuel
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorMoussa, Alain
dc.contributor.authorMerckling, Clement
dc.contributor.authorEyben, Pierre
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.accessioned2021-10-22T20:51:09Z
dc.date.available2021-10-22T20:51:09Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25605
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/118/22/10.1063/1.4936895
dc.source.beginpage225304
dc.source.issue22
dc.source.journalJournal of Applied Physics
dc.source.volume118
dc.title

Surface characterization of InP trenches embedded in oxide using scanning probe microscopy

dc.typeJournal article
dspace.entity.typePublication
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