Publication:

Surface characterization of InP trenches embedded in oxide using scanning probe microscopy

Date

2015
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorMannarino, Manuel
dc.contributor.authorChintala, Ravi Chandra
dc.contributor.authorMoussa, Alain
dc.contributor.authorMerckling, Clement
dc.contributor.authorEyben, Pierre
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.accessioned2021-10-22T20:51:09Z
dc.date.available2021-10-22T20:51:09Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25605
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/118/22/10.1063/1.4936895
dc.source.beginpage225304
dc.source.issue22
dc.source.journalJournal of Applied Physics
dc.source.volume118
dc.title

Surface characterization of InP trenches embedded in oxide using scanning probe microscopy

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
32503.pdf
Size:
4.4 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles