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Vapor phase deposited total X-ray fluorescence as a means to study copper drift diffusion in low-k dielectrics
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Vapor phase deposited total X-ray fluorescence as a means to study copper drift diffusion in low-k dielectrics
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Date
2001
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5439.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lanckmans, Filip
;
Arnauts, Sophia
;
Maex, Karen
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1936
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1936
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations