Publication:
Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
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2015 since deposited on 2021-10-16
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Acq. date: 2026-10-05
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2015 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-10-05
Citations