Publication:
Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
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2010 since deposited on 2021-10-16
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Acq. date: 2025-10-24
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Metrics
Views
2010 since deposited on 2021-10-16
445item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations