Publication:
Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
Date
| dc.contributor.author | Van Barel, Greg | |
| dc.contributor.author | Van Hoof, Rita | |
| dc.contributor.author | Du Bois, Bert | |
| dc.contributor.author | Verbist, Agnes | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Van Hoof, Rita | |
| dc.contributor.imecauthor | Du Bois, Bert | |
| dc.contributor.orcidimec | Du Bois, Bert::0000-0003-0147-1296 | |
| dc.date.accessioned | 2021-10-16T20:24:14Z | |
| dc.date.available | 2021-10-16T20:24:14Z | |
| dc.date.issued | 2007-03 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13012 | |
| dc.source.beginpage | 1 | |
| dc.source.conference | Materials for Advanced Metallization - MAM | |
| dc.source.conferencedate | 4/03/2007 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.source.endpage | 2 | |
| dc.title | Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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