Publication:

A manufacturable 25nm planar MOSFET technology

Date

2001

Proceedings Paper

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Author(s)

Ponomarev, Youri

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;

;

Cubaynes, Florence

;

Verheijen, M. A.

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;

van Berkum, J. G. M.

;

Kubicek, Stefan

;

;

Rovers, Madelon

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