Publication:

A manufacturable 25nm planar MOSFET technology

Date

2001

Proceedings Paper

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Author(s)

Ponomarev, Youri

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;

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Cubaynes, Florence

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Verheijen, M. A.

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;

van Berkum, J. G. M.

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Kubicek, Stefan

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Rovers, Madelon

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1981 since deposited on 2021-10-14

Acq. date: 2026-06-20