Publication:
A manufacturable 25nm planar MOSFET technology
Date
| dc.contributor.author | Ponomarev, Youri | |
| dc.contributor.author | Loo, Josine | |
| dc.contributor.author | Dachs, Charles | |
| dc.contributor.author | Cubaynes, Florence | |
| dc.contributor.author | Verheijen, M. A. | |
| dc.contributor.author | Kaiser, M. | |
| dc.contributor.author | van Berkum, J. G. M. | |
| dc.contributor.author | Kubicek, Stefan | |
| dc.contributor.author | Bolk, J. | |
| dc.contributor.author | Rovers, Madelon | |
| dc.contributor.imecauthor | Kubicek, Stefan | |
| dc.date.accessioned | 2021-10-14T17:37:03Z | |
| dc.date.available | 2021-10-14T17:37:03Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5582 | |
| dc.source.beginpage | 33 | |
| dc.source.conference | Symposium on VLSI Technology Digest of Technical Papers; | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 34 | |
| dc.title | A manufacturable 25nm planar MOSFET technology | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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