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A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of silicon
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A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of silicon
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Date
2010
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Gong, Chun
;
Posthuma, Niels
;
Van Kerschaver, Emmanuel
;
Poortmans, Jef
;
Mertens, Robert
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1950
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-11
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Views
1950
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-11
Citations