Publication:
A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of silicon
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-6029-1909 | |
| cris.virtual.orcid | 0000-0003-2077-2545 | |
| cris.virtual.orcid | 0000-0002-5218-4046 | |
| cris.virtualsource.department | e9f2179a-12bb-4886-8a65-41ff6e115551 | |
| cris.virtualsource.department | 0e532c5a-3db8-4a47-8590-f713d81a8067 | |
| cris.virtualsource.department | 715a9ada-0798-46d2-a8ca-4775db9a8e46 | |
| cris.virtualsource.orcid | e9f2179a-12bb-4886-8a65-41ff6e115551 | |
| cris.virtualsource.orcid | 0e532c5a-3db8-4a47-8590-f713d81a8067 | |
| cris.virtualsource.orcid | 715a9ada-0798-46d2-a8ca-4775db9a8e46 | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Gong, Chun | |
| dc.contributor.author | Posthuma, Niels | |
| dc.contributor.author | Van Kerschaver, Emmanuel | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Posthuma, Niels | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Posthuma, Niels::0000-0002-6029-1909 | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-18T21:36:10Z | |
| dc.date.available | 2021-10-18T21:36:10Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17989 | |
| dc.source.beginpage | 145 | |
| dc.source.conference | High Purity Silicon 11 | |
| dc.source.conferencedate | 10/10/2010 | |
| dc.source.conferencelocation | Las Vegas, NV USA | |
| dc.source.endpage | 153 | |
| dc.title | A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of silicon | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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