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Characterization and Reliability Study of an Al-Doped HfO2-Based High-Density 2.5-D MIMCAP
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Characterization and Reliability Study of an Al-Doped HfO2-Based High-Density 2.5-D MIMCAP
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Date
2024
Journal article
https://doi.org/10.1109/TED.2024.3386871
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chery, Emmanuel
;
Croes, Kristof
;
Nolmans, Philip
;
Beyne, Eric
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
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665
since deposited on 2024-04-26
9
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
665
since deposited on 2024-04-26
9
last month
Acq. date: 2025-12-16
Citations